Skip to main content
bioRxiv
  • Home
  • About
  • Submit
  • ALERTS / RSS
Advanced Search
New Results

Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon

View ORCID ProfileSagar Yadavali, View ORCID ProfileDaeyeon Lee, View ORCID ProfileDavid Issadore
doi: https://doi.org/10.1101/625277
Sagar Yadavali
1Department of Bioengineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
  • Find this author on Google Scholar
  • Find this author on PubMed
  • Search for this author on this site
  • ORCID record for Sagar Yadavali
Daeyeon Lee
2Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
  • Find this author on Google Scholar
  • Find this author on PubMed
  • Search for this author on this site
  • ORCID record for Daeyeon Lee
David Issadore
1Department of Bioengineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
2Department of Chemical and Biomolecular Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
3Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, Pennsylvania, 19104, USA
  • Find this author on Google Scholar
  • Find this author on PubMed
  • Search for this author on this site
  • ORCID record for David Issadore
  • For correspondence: issadore@seas.upenn.edu
  • Abstract
  • Full Text
  • Info/History
  • Metrics
  • Supplementary material
  • Preview PDF
Loading

Abstract

We present a new, robust three dimensional microfabrication method for highly parallel microfluidics, to improve the throughput of on-chip material synthesis by allowing parallel and simultaneous operation of many replicate devices on a single chip. Recently, parallelized microfluidic chips fabricated in Silicon and glass have been developed to increase the throughput of microfluidic materials synthesis to an industrially relevant scale. These parallelized microfluidic chips require large arrays (> 10,000) of Through Silicon Vias (TSVs) to deliver fluid from delivery channels to the parallelized devices. Ideally, these TSVs should have a small footprint to allow a high density of features to be packed into a single chip, have channels on both sides of the wafer, and at the same time minimize debris generation and wafer warping to enable permanent bonding of the device to glass. Because of these requirements and challenges, previous approaches cannot be easily applied to produce three dimensional microfluidic chips with a large array of TSVs. To address these issues, in this paper we report a fabrication strategy for the robust fabrication of three-dimensional Silicon microfluidic chips consisting of a dense array of TSVs, designed specifically for highly parallelized microfluidics. In particular, we have developed a two-layer TSV design that allows small diameter vias (d < 20 µm) without sacrificing the mechanical stability of the chip and a patterned SiO2 etch-stop layer to replace the use of carrier wafers in Deep Reactive Ion Etching (DRIE). Our microfabrication strategy allows >50,000 (d = 15 µm) TSVs to be fabricated on a single 4” wafer, using only conventional semiconductor fabrication equipment, with 100% yield (M = 16 chips) compared to 30% using previous approaches. We demonstrated the utility of these fabrication strategies by developing a chip that incorporates 20,160 flow focusing droplet generators onto a single 4” Silicon wafer, representing a 100% increase in the total number of droplet generators than previously reported. To demonstrate the utility of this chip for generating pharmaceutical microparticle formulations, we generated 5–9 µm polycaprolactone particles with a CV <5% at a rate as high as 60 g/hr (> 1 trillion particles / hour).

Copyright 
The copyright holder for this preprint is the author/funder, who has granted bioRxiv a license to display the preprint in perpetuity. All rights reserved. No reuse allowed without permission.
Back to top
PreviousNext
Posted May 05, 2019.
Download PDF

Supplementary Material

Email

Thank you for your interest in spreading the word about bioRxiv.

NOTE: Your email address is requested solely to identify you as the sender of this article.

Enter multiple addresses on separate lines or separate them with commas.
Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon
(Your Name) has forwarded a page to you from bioRxiv
(Your Name) thought you would like to see this page from the bioRxiv website.
CAPTCHA
This question is for testing whether or not you are a human visitor and to prevent automated spam submissions.
Share
Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon
Sagar Yadavali, Daeyeon Lee, David Issadore
bioRxiv 625277; doi: https://doi.org/10.1101/625277
Reddit logo Twitter logo Facebook logo LinkedIn logo Mendeley logo
Citation Tools
Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon
Sagar Yadavali, Daeyeon Lee, David Issadore
bioRxiv 625277; doi: https://doi.org/10.1101/625277

Citation Manager Formats

  • BibTeX
  • Bookends
  • EasyBib
  • EndNote (tagged)
  • EndNote 8 (xml)
  • Medlars
  • Mendeley
  • Papers
  • RefWorks Tagged
  • Ref Manager
  • RIS
  • Zotero
  • Tweet Widget
  • Facebook Like
  • Google Plus One

Subject Area

  • Bioengineering
Subject Areas
All Articles
  • Animal Behavior and Cognition (4658)
  • Biochemistry (10311)
  • Bioengineering (7631)
  • Bioinformatics (26232)
  • Biophysics (13466)
  • Cancer Biology (10645)
  • Cell Biology (15358)
  • Clinical Trials (138)
  • Developmental Biology (8462)
  • Ecology (12774)
  • Epidemiology (2067)
  • Evolutionary Biology (16786)
  • Genetics (11370)
  • Genomics (15425)
  • Immunology (10572)
  • Microbiology (25083)
  • Molecular Biology (10170)
  • Neuroscience (54228)
  • Paleontology (398)
  • Pathology (1660)
  • Pharmacology and Toxicology (2880)
  • Physiology (4323)
  • Plant Biology (9207)
  • Scientific Communication and Education (1582)
  • Synthetic Biology (2543)
  • Systems Biology (6760)
  • Zoology (1456)