RT Journal Article SR Electronic T1 Integrated optical device for Structured Illumination Microscopy JF bioRxiv FD Cold Spring Harbor Laboratory SP 2022.04.22.489094 DO 10.1101/2022.04.22.489094 A1 Matteo Calvarese A1 Petra Paiè A1 Alessia Candeo A1 Gianmaria Calisesi A1 Francesco Ceccarelli A1 Gianluca Valentini A1 Roberto Osellame A1 Hai Gong A1 Mark A. Neil A1 Francesca Bragheri A1 Andrea Bassi YR 2022 UL http://biorxiv.org/content/early/2022/04/22/2022.04.22.489094.abstract AB Structured Illumination Microscopy (SIM) is a key technology for high resolution and super-resolution imaging of biological cells and molecules. The spread of portable and easy-to-align SIM systems requires the development of novel methods to generate a light pattern and to shift it across the field of view of the microscope. Here we show a miniaturized chip that incorporates optical waveguides, splitters, and phase shifters, to generate a 2D structured illumination pattern suitable for SIM microscopy. The chip creates three point-sources, coherent and controlled in phase, without the need for further alignment. Placed in the pupil of a microscope’s objective, the three sources generate a hexagonal illumination pattern on the sample, which is spatially translated thanks to thermal phase shifters. We validate and use the chip, upgrading a commercial inverted fluorescence microscope to a SIM setup and we image biological sample slides, extending the resolution of the microscope.Competing Interest StatementThe authors have declared no competing interest.